Vacuum systems

PLS590

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Pfeiffer Vacuum PLS 590 high vacuum laboratory coating
system can be used for R&D or small-scale production. Suitable for processes: PVD,
including E-beam evaporation, ion beam sputtering IBS,
high vacuum applications.

Modernized system with new Vakuum servis control software

High vacuum evaporation chamber ca 1m³ with electron gun Ferrotec EVM 8 and thermal sources and 2x turbomolecular vacuum pumps. It is possible to connect a vacuum system according to the process specification. It is possible to install an ion source.

Our offer

For more than 30 years, we have been specialists in the development, production, sale and service of vacuum equipment. We are an official service center for Pfeiffer Vacuum and VAT.

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and production Service Leak
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